Anhut, TiemoAntolovic, Ivan MichelSchwedt, DanielCharbon, EdoardoBruschini, Claudio2022-03-012022-03-012022-03-012022https://infoscience.epfl.ch/handle/20.500.14299/185975A method for operating a light microscope comprises emitting and guiding a plurality of illumination light beams towards a specimen (6) to form a plurality of separated illumination light spots (2A, 2B, 2C, 2D) at the specimen; and guiding detection light beams (11) coming from the illumination light spots (2A, 2B, 2C, 2D) to a detector (10) comprising a plurality of sensor arrays (31-34). Each sensor array (31-34) comprises photon-counting detector elements (40), and detection light beams (11) from different illumination light spots (2A, 2B, 2C, 2D) are guided to different sensor arrays (31-34). Measured signals from the sensor arrays (31-34) are analysed to determine positional information about the light spots (15) on the sensor arrays (31 -34). It is adjusted where the light spots (15) hit the sensor arrays (31-34) based on the positional information. A corresponding light microscope is furthermore disclosed.Method and light microscope with a plurality of arrays of photon-counting detector elementspatentJP2023540435US2023288687CN116710828EP4189456WO202202280772050811