Raman spectroscopy of sputtered AlN films: E-2(high) biaxial strain dependence

Trodahl, H. J.Martin, F.Muralt, P.Setter, N.2007-10-182007-10-182007-10-18200610.1063/1.2335582https://infoscience.epfl.ch/handle/20.500.14299/13099WOS:0002396908000369081Raman spectroscopy of sputtered AlN films: E-2(high) biaxial strain dependencetext::journal::journal article::research article