Epitaxy and characterization of Si1-x-yGexCy alloy layers grown on (100) Si by rapid thermal chemical vapor deposition

Dutoit, MichelMi, Jian2005-03-162005-03-16199510.5075/epfl-thesis-1424https://infoscience.epfl.ch/handle/20.500.14299/209908enEpitaxy and characterization of Si1-x-yGexCy alloy layers grown on (100) Si by rapid thermal chemical vapor depositionthesis::doctoral thesis