Thermal-mechanical detector array with integrated diffraction grating

Ferhanoglu, O.Toy, M. F.Unal, G.Kalyoncu, H.Kabuli, G.Caliskan, A. U.Urey, H.2011-01-212011-01-212011-01-21200710.1109/LEOS.2007.4382668https://infoscience.epfl.ch/handle/20.500.14299/63218An uncooled thermal detector array with low NETD is designed and fabricated using MEMS bimaterial structures. A diffraction grating is embedded on the pixel membrane for sensing sub-nm mechanical deflections. The first order reflected light was focused on a CCD camera to monitor the entire array. Results show that it is possible to achieve <50mK NETD using a 12 bit CCD camera.Thermal-mechanical detector array with integrated diffraction gratingtext::conference output::conference proceedings::conference paper