Grétillat, M.-A.Thiébaud, P.Linder, C.de Rooij, N. F.2009-05-122009-05-122009-05-12199510.1088/0960-1317/5/2/026https://infoscience.epfl.ch/handle/20.500.14299/39322Integrated Circuit Compatible Electrostatic Polysilicon Microrelaystext::journal::journal article::research article