Mechanical and adhesion characterization of dry photoresist and porous films used for foil-level encapsulation of chemical sensors

Vasquez Quintero, AndresBriand, Danickde Rooij, Nico F.2012-08-302012-08-302012-08-302012https://infoscience.epfl.ch/handle/20.500.14299/85160Mechanical and adhesion characterization of dry photoresist and porous films used for foil-level encapsulation of chemical sensorstext::conference output::conference presentation