Cruau, A.Lissorgues, G.Nicole, P.Placko, D.Ionescu, A. M.2007-10-102007-10-102007-10-102004https://infoscience.epfl.ch/handle/20.500.14299/12797WOS:0002343450000047940V-shaped micromechanical tunable capacitor for RF applicationstext::conference output::conference proceedings::conference paper