Rossier, J. S.Vollet, C.Carnal, A.Lagger, G.Gobry, V.Girault, H. H.Michel, P.Reymond, F.2005-11-072005-11-07200210.1039/b204063hhttps://infoscience.epfl.ch/handle/20.500.14299/219349WOS:000178030900006Plasma etched polymer microelectrochemical systemstext::journal::journal article::research article