Delacrétaz, YvesBergoënd, IsabelleDepeursinge, Christian2010-03-152010-03-152010-03-152009https://infoscience.epfl.ch/handle/20.500.14299/48094We have demonstrated the suitability of digital holographic microscopy (DHM) with near infra-red illumination for micro-optical elements and silicon micro-systems characterization, opening a wide field of quality control applications.[MVD]Digital holographic microscopy for micro-systems investigation in near infraredtext::conference output::conference paper not in proceedings