Pham, P. Q.Briand, D.de Rooij, N. F.2009-05-122009-05-122009-05-122003https://infoscience.epfl.ch/handle/20.500.14299/39685Polysilicon Surface Micromachinig for the Fabrication of Thermally Isolated Micro-Igniterstext::conference output::conference proceedings::conference paper