Villanueva, G.Bausells, J.Montserrat, J.Perez-Murano, F.2013-08-062013-08-062013-08-06200510.1109/SCED.2005.1504494https://infoscience.epfl.ch/handle/20.500.14299/93849Polysilicon piezoresistive cantilevers for intermolecular force detectiontext::conference output::conference proceedings::conference paper