Cointegration of Gate-All-Around MOSFETs and Local Silicon-on-Insulator Optical Waveguides on Bulk Silicon

Moselund, K. E.Bouvet, D.Tschuor, L.Pott, V.Dainesi, P.Eggimann, C.Le Thomas, N.Houdre, R.Ionescu, A. M.2010-11-082010-11-082010-11-08200710.1109/TNANO.2006.886748https://infoscience.epfl.ch/handle/20.500.14299/57261WOS:000243917700019Cointegration of Gate-All-Around MOSFETs and Local Silicon-on-Insulator Optical Waveguides on Bulk Silicontext::journal::journal article::research article