Staufer, U.de Rooij, N. F.Akiyama, T.Gullo, M.Imer, R.Suter, K.Frederix, P.Engel, A.Tonin, A.Stolz, M.Aebi, U.Ensslin, K.Baumgartner, A.2009-05-122009-05-122009-05-122003https://infoscience.epfl.ch/handle/20.500.14299/39893Highlights in Module 2 - Nanotoolstext::conference output::conference proceedings::conference paper