Fabrication and characterization of a silicon cantilever probe with an integrated quartz-glass (fused-silica) tip for scanning near-field optical microscopy

Schürmann, G.Noell, W.Staufer, U.de Rooij, N. F.Eckert, R.Freyland, J. M.Heinzelmann, H.2009-05-122009-05-122009-05-12200110.1364/AO.40.005040https://infoscience.epfl.ch/handle/20.500.14299/39847Fabrication and characterization of a silicon cantilever probe with an integrated quartz-glass (fused-silica) tip for scanning near-field optical microscopytext::journal::journal article::research article