Heterogeneous integration of ReRAM crossbars in a CMOS foundry chip

Sandrini, JuryCevrero, AlessandroDemirci, TugbaGaillardon, Pierre-EmmanuelSacchetto, DavideDe Micheli, GiovanniLeblebici, Yusuf2014-09-302014-09-302014-09-302014https://infoscience.epfl.ch/handle/20.500.14299/107147In this paper, we present a heterogeneous integration of ReRAMs with standard CMOS technology by post-processing the Back-End-of-the-Line (BEOL) of fully finished CMOS chips.ReRAMBEOLCMOSHeterogeneous integration of ReRAM crossbars in a CMOS foundry chiptext::conference output::conference proceedings::conference paper