Spettel, JasminLiffredo, MarcoCassese, TommasoFurci, HernanDubois, FlorianQuack, NielsMoridi, MohssenVillanueva, GuillermoThang Duy Dao2023-03-272023-03-272023-03-272022-01-01https://infoscience.epfl.ch/handle/20.500.14299/196479WOS:000925380500110Aluminium nitride is a promising photonic material from the ultra-violet to the mid-infrared spectral range. We present spectroscopic ellipsometry of sputtered AlN thin films on insulator in the spectral range 0.19 mu m - 25 mu m, surface roughness characterization, waveguide and grating coupler designs at telecom wavelength. (C) 2022 The Author(s)OpticsTelecommunicationsOpticsTelecommunicationsthin-filmsgenerationOptical Properties of Aluminium Nitride on Insulator for Integrated Photonicstext::conference output::conference proceedings::conference paper