Kim, M.-S.Manzardo, O.Dandliker, R.Herzig, H. P.Aeschimann, L.Staufer, U.Vettiger, P.Lee, J.-H.2009-04-222009-04-222009-04-22200510.1109/OMEMS.2005.1540134https://infoscience.epfl.ch/handle/20.500.14299/37957Atomic Force Microscopy with Optical Heterodyne Detection Methodtext::conference output::conference proceedings::conference paper