Lichtenberg, J.Lammel, G.Oulevey, M.Verpoorte, E.Renaud, P.de Rooij, N. F.2009-05-122009-05-122009-05-122000https://infoscience.epfl.ch/handle/20.500.14299/39530Fabrication of electrically insulated microchannels in silicon (poster)text::conference output::conference proceedings::conference paper