Thomet, Jonathan2024-03-142024-03-142024-03-142023-09-1410.5075/epfl-PV-LAB-309572https://infoscience.epfl.ch/handle/20.500.14299/206117Raw experimental data sorted by toolenInGaN PECVDPV applicationsMicroscopydataset56dea700-4a70-4c2f-a3a9-7303fdefe300