Schilling, A.Nussbaum, Ph.Philipoussis, I.Herzig, H. P.2009-04-222009-04-222009-04-22200010.1364/DOMO.2000.DWA3https://infoscience.epfl.ch/handle/20.500.14299/37812Micro-optical elements with arbitrary surfacestext::conference output::conference proceedings::conference paper