Zamkostian, F.Liotard, A.Lanzoni, P.Waldis, S.Noell, W.de Rooij, N. F.Conedera, V.Fabre, N.2009-05-122009-05-122009-05-12200710.1109/OMEMS.2007.4373905https://infoscience.epfl.ch/handle/20.500.14299/40031Optical MEMS for Future Instruments in Astronomytext::conference output::conference proceedings::conference paper