Moser, Simon KarlMoreschini, LucaRotenberg, Eli2017-05-242017-05-242017-05-242014https://infoscience.epfl.ch/handle/20.500.14299/137607A method for lithographic patterning of an insulating or semiconducting solid state material in crystalline form, said method comprising a step where said material is exposed to an amount of radiation which is sufficient to change its insulating or semiconducting state into a conducting state.patentUS2015323864WO201408036750000030