A mechanistic study of GaN Lift-Off

Bret, TristanWagner, VolkerMartin, DennisHoffmann, PatrikIlegems, Mark2009-07-202009-07-202009-07-20200210.1002/1521-396X(200212)194:2<559::AID-PSSA559>3.0.CO;2-Shttps://infoscience.epfl.ch/handle/20.500.14299/41725[NRG]A mechanistic study of GaN Lift-Offtext::conference output::conference proceedings::conference paper