Grétillat, M.-A.Yang, Y.-J.Hung, E. S.Rabinovich, V.Ananthasuresh, G.-K.de Rooij, N. F.Senturia, S. D.2009-05-122009-05-122009-05-12199710.1109/SENSOR.1997.635406https://infoscience.epfl.ch/handle/20.500.14299/39324Nonlinear Electromechanical Behavior of an Electrostatic Microrelaytext::conference output::conference proceedings::conference paper