6Dynamic MEMS-based linear (1D) diffusers for laser beam homogenizing and beam shaping

Masson, J.Bich, A.Noell, W.Voelkel, R.Weible, K. J.de Rooij, N. F.2010-02-112010-02-112010-02-11200910.1117/12.827663https://infoscience.epfl.ch/handle/20.500.14299/466216Dynamic MEMS-based linear (1D) diffusers for laser beam homogenizing and beam shapingtext::conference output::conference proceedings::conference paper