Co-integration of gate-all-around MOSFETs and local silicon-on insulator optical waveguides on bulk silicon for GHz on-chip optical signaling

Moselund, K. E.Tschuor, L.Bouvet, D.Pott, V.Dainesi, P.Eggimann, C.Le Thomas, N.Houdré, R.Ionescu, A. M.2007-05-162007-05-162007-05-162006https://infoscience.epfl.ch/handle/20.500.14299/6991Co-integration of gate-all-around MOSFETs and local silicon-on insulator optical waveguides on bulk silicon for GHz on-chip optical signalingtext::conference output::conference proceedings::conference paper