Sasaki, M.Hane, K.Briand, D.Noell, W.de Rooij, N.2010-06-182010-06-182010-06-182008https://infoscience.epfl.ch/handle/20.500.14299/50907Conditions of Micromirror Lifted by Buckled Bridges Using Film Stresstext::conference output::conference presentation