Microsystems for diverse applications using recently developed microfabrication techniques

Dellmann, L.Akiyama, T.Briand, D.Gautsch, S.Guenat, O.Guldimann, B.Luginbuhl, Ph.Marxer, C.Staufer, U.van der Schoot, B.de Rooij, N. F.2009-05-122009-05-122009-05-122000https://infoscience.epfl.ch/handle/20.500.14299/39195Microsystems for diverse applications using recently developed microfabrication techniquestext::conference output::conference proceedings::conference paper