Consequences of non-uniform RF plasma potential in large-area capacitive reactors

Ballutaud, J.Hollenstein, Ch.Howling, A.A.Sansonnens, L.Schmidt, H.Schmitt, J.P.M.2008-05-132008-05-132008-05-132003https://infoscience.epfl.ch/handle/20.500.14299/25152Consequences of non-uniform RF plasma potential in large-area capacitive reactorstext::conference output::conference paper not in proceedings