Glass reflow on 3-dimensional micro-apertures for electrophysiological measurements on-chip

Lehnert, ThomasNguyen, D. M. T.Baldi Unser, LuciaGijs, Martin A. M.2006-12-192006-12-192006-12-19200710.1007/s10404-006-0111-xhttps://infoscience.epfl.ch/handle/20.500.14299/238581WOS:000243914700013Glass reflow on 3-dimensional micro-apertures for electrophysiological measurements on-chiptext::journal::journal article::research article