Special Issue: 15 Years of SU8 as MEMS Material

Bertsch, ArnaudRenaud, Philippe2015-06-222015-06-222015-06-22201510.3390/mi6060790https://infoscience.epfl.ch/handle/20.500.14299/115283WOS:000357592500009Special Issue: 15 Years of SU8 as MEMS Materialtext::journal::journal article::research article