Phase diagrams and microstructure of microcrystalline and amorphous silicon studied by dynamical simulation of the growth of microcrystalline silicon

Bailat, J.Vallat-Sauvain, E.Vallat, A.Shah, A.2009-02-102009-02-10200410.1557/PROC-808-A5.3https://infoscience.epfl.ch/handle/20.500.14299/35065Phase diagrams and microstructure of microcrystalline and amorphous silicon studied by dynamical simulation of the growth of microcrystalline silicontext::conference output::conference proceedings::conference paper