Belgacem, B.Calame, F.Muralt, P.2008-04-112008-04-112008-04-11200710.1007/s10832-007-9031-8https://infoscience.epfl.ch/handle/20.500.14299/20460WOS:00025179520002111738Piezoelectric micromachined ultrasonic transducers with thick PZT sol gel filmstext::journal::journal article::research article