Kim, M.-S.Scharf, ToralfHaq, Mohammad TahdiulNakagawa, WataruHerzig, Hans Peter2011-10-032011-10-032011-10-03201110.1364/OL.36.003930https://infoscience.epfl.ch/handle/20.500.14299/71417WOS:000295415600072We report on the fabrication and characterization of nanoscale solid immersion lenses (nano-SILs) with sizes down to a subwavelength range. Submicrometer-scale cylinders fabricated by electron-beam lithography are thermally reflowed to form a spherical shape. Subsequent soft lithography leads to nano-SILs on transparent substrates for optical characterization. The optical characterization is performed using a high-resolution interference microscope with illumination at 642nm wavelength. The focal spots produced by the nano-SILs show both spot-size reduction and enhanced optical intensity, which are consistent with the immersion effect. (C) 2011 Optical Society of AmericaResolution Interference MicroscopyFieldLithographyScaletext::journal::journal article::research article