Lopez, Mariazel MaquedaCasu, Emanuele AndreaFernandez-Bolanos, MontserratIonescu, Adrian Mihai2017-09-272017-09-272017-09-27201710.3390/proceedings1040391https://infoscience.epfl.ch/handle/20.500.14299/140848Low Impedance ALD HfO2 Partially-Filled-Gap Flexural and Bulk MEMS Resonators Piezoresistively Detected for Distributed Mass Sensingtext::conference output::conference proceedings::conference paper