de Rooij, NicoBriand, DanickJanphuang, Pattanaphong2014-08-112014-08-112014-08-11201410.5075/epfl-thesis-6306https://infoscience.epfl.ch/handle/20.500.14299/105460urn:nbn:ch:bel-epfl-thesis6306-2envibrational energy harvestingpiezoelectric energy harvesterlow-frequencyresonantimpactwafer level fabricationlead zirconate titante (PZT)bulk PZTthinned PZTpluckingfrequency up-conversionrotating gearoscillating mass-gear systemBulk piezoelectric MEMS harvesters operating at low frequency for energy autonomous systemsthesis::doctoral thesis