Manzardo, O.Chantada, L.Kim, M.-S.Aeschimann, L.Akiyama, T.de Rooij, N. F.Staufer, U.Vettiger, P.Dändliker, R.Herzig, H. P.2009-05-122009-05-122009-05-122006https://infoscience.epfl.ch/handle/20.500.14299/39570Optical Read-out of Parallel Cantilever AFM arraystext::conference output::conference proceedings::conference paper