Bacheva, VesnaLeroy, EdouardShmulevich, ShaiBalciunaite, AisteDavila, DianaCauquil, EleonoreGabay, IsraelPereiro, IagoShea, HerbertKaigala, Govind V.Bercovici, Moran2022-05-092022-05-092022-05-092022-01-0110.1109/MEMS51670.2022.9699795https://infoscience.epfl.ch/handle/20.500.14299/187682WOS:000784358100056We present a method to control individual high-voltage actuators in an array using microfabricated photoconductive switches and a light projection system, thus overcoming the challenges of on-chip control at high voltages. Such switching capabilities go beyond actuators - our proposed approach may open the door to the simple control of other high-voltage processes, such as MEMS, pressure sensors, and RF devices.Engineering, Electrical & ElectronicEngineering, MechanicalNanoscience & NanotechnologyEngineeringScience & Technology - Other Topicsvoltage controlactuatorsphotoconductorphotocontrolamorphous silicontext::conference output::conference proceedings::conference paper