Miniaturized time-scanning Fourrier Transform Spectrometer using an Electrostatic Actuator

Manzardo, O.Marxer, C.Herzig, H. P.2009-04-222009-04-222009-04-22199910.1117/12.354842https://infoscience.epfl.ch/handle/20.500.14299/37774Miniaturized time-scanning Fourrier Transform Spectrometer using an Electrostatic Actuatortext::conference output::conference proceedings::conference paper