Characterisation and modelling of nitrogen plasmas for the deposition of nanostructured GaN using different plasma sources

Hollenstein, ChristophTran, Minh QuangMartinet, David2014-07-092014-07-092014-07-09201410.5075/epfl-thesis-6202https://infoscience.epfl.ch/handle/20.500.14299/104968urn:nbn:ch:bel-epfl-thesis6202-1ennitrogen plasmalow pressurecollisional-radiative modelGaNnanocolumnsilicon waferLangmuir probe measurementoptical emission spectroscopyCharacterisation and modelling of nitrogen plasmas for the deposition of nanostructured GaN using different plasma sourcesthesis::doctoral thesis