Aspects of the Surface-Roughness of Ceramic Bonding Tools on a Nanometer-Scale Investigated with Atomic-Force Microscopy

Burger, J.Dietler, G.Binggeli, M.Christoph, R.Marti, O.2007-06-202007-06-202007-06-20199410.1016/0040-6090(94)90339-5https://infoscience.epfl.ch/handle/20.500.14299/9028Aspects of the Surface-Roughness of Ceramic Bonding Tools on a Nanometer-Scale Investigated with Atomic-Force Microscopytext::journal::journal article::research article