Overstolz, T.Clerc, P.-A.Gale, M. T.Herzig, H. P.Niederer, G.Noell, W.Sachtig, J.Thiele, H.de Rooij, N. F.2009-05-122009-05-122009-05-12200210.1109/OMEMS.2002.1031453https://infoscience.epfl.ch/handle/20.500.14299/39655Tilting Out-Of-Plane Platform For Optical Applicationstext::conference output::conference proceedings::conference paper