Optical measurement of the global and local geometry of grating structures

Blattner, P.Traut, S.Herzig, H. P.2009-04-222009-04-222009-04-22199810.1364/DOMO.1998.DThA.2https://infoscience.epfl.ch/handle/20.500.14299/37729Optical measurement of the global and local geometry of grating structurestext::conference output::conference proceedings::conference paper