Interferometer coordinate measurement system for use in measurement and machining tools has partially reflecting boundary surfaces within its measurement head with a separation shorter than the coherence length

Hauger, ChristophLasser, TheoSiegel, AugustinHöller, FrankKnupfer, KlausMonz, LudwinGross, Herbert2011-04-152011-04-152011-04-152004https://infoscience.epfl.ch/handle/20.500.14299/66497The invention relates to an interferometer system (41), especially for use in a co-ordinate measuring system. Said interferometer system comprises, disposed in an illumination beam path, a pair of spaced-apart boundary surfaces (52, 53). A boundary surface (53) facing an object (9) is arranged in a detection beam path, a detector (61) being additionally disposed in said detection beam path. The invention also relates to an interferometer system, especially one of the above-described type, which is provided with a speed indicating system for detecting a relative speed between the test head and the object. A frequency filter of the interferometer system is adjusted depending on the relative speed.Interformeter systemMeasuring deviceInterferometer coordinate measurement system for use in measurement and machining tools has partially reflecting boundary surfaces within its measurement head with a separation shorter than the coherence lengthpatentDE10392656DE10260256DE10392656DE10260256WO2004057266WO2004057266DE10260256AU2003290103WO200405726632519247