Optimization of piezoresistive cantilever sensors towards highly sensitive membrane-type surface stress sensor (MSS) and its applications

Yoshikawa, G.Akiyama, TerunobuGautsch, SebastianVettiger, PeterRohrer, H.2011-11-282011-11-282011-11-282011https://infoscience.epfl.ch/handle/20.500.14299/72849Optimization of piezoresistive cantilever sensors towards highly sensitive membrane-type surface stress sensor (MSS) and its applicationstext::conference output::conference presentation