Lucklum, F.Jakoby, B.Hauptmann, P.de Rooij, N. F.2009-05-122009-05-122009-05-12200610.1109/FREQ.2006.275366https://infoscience.epfl.ch/handle/20.500.14299/39565Remote Electromagnetic Excitation of High-Q Silicon Resonator Sensorstext::conference output::conference proceedings::conference paper