Mastrangeli, MassimoJacot-Descombes, LoicGullo, Maurizio R.Brugger, Juergen2015-05-292015-05-292015-05-29201410.1109/MEMSYS.2014.6765572https://infoscience.epfl.ch/handle/20.500.14299/114780WOS:000352217500015We present a new method to encapsulate functional liquids into sealed MEMS capsules by fluidic self-assembly. Self-assembly of 200 mu m SU-8 cargos and picoliter liquid co-encapsulation are driven by the interplay of global fluidic drag and short-range capillary forces. The latter ensues from the localized surface-selective precipitation of a photopolymerizable adhesive onto the capsules' rim. Assembly yield higher than 50% is achieved, and can be improved by optimized agitation and shape matching. The method is massively parallel, scalable and compatible with batch MEMS fabrication. It can address a variety of applications, including distributed MEMS, cell encapsulation and drug delivery.microencapsulationself-assemblyfluidicsSU-8capillaritysurface engineeringtext::conference output::conference proceedings::conference paper