High-Q 3D Embedded Inductors using TSV for RF MEMS Tunable Bandpass Filters (4.65-6.8 GHz)

Vitale, Wolfgang AmadeusFernandez-Bolanos Badia, MontserratIonescu, Mihai Adrian2012-06-272012-06-272012-06-272012https://infoscience.epfl.ch/handle/20.500.14299/82421High-Q 3D Embedded Inductors using TSV for RF MEMS Tunable Bandpass Filters (4.65-6.8 GHz)text::conference output::conference proceedings::conference paper