Richter, H.Orlowski, T. E.Kelly, M.Margaritondo, G.2006-10-032006-10-032006-10-03198410.1063/1.334273https://infoscience.epfl.ch/handle/20.500.14299/234356Ultrafast Uv-Laser-Induced Oxidation of Silicon - Control and Characterization of the Si-Sio2 Interfacetext::journal::journal article::research article