MEMS Tunable Capacitor with laterally driven fragmented electrodes and electro-thermal actuation

Mehdaoui, A.Tsamados, D.Casset, F.Ionescu, A. M.Ancey, P.2007-05-162007-05-162007-05-162006https://infoscience.epfl.ch/handle/20.500.14299/6987MEMS Tunable Capacitor with laterally driven fragmented electrodes and electro-thermal actuationtext::conference output::conference proceedings::conference paper